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1

Silicon full wafer bonding with atomic layer deposited titanium dioxide and aluminum oxide intermediate films

R.L. Puurunen, T. Suni, O.M.E. Ylivaara, H. Kondo, M. Ammar, T. Ishida, H. Fujita, A. Bosseboeuf, S. Zaima, H. Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.74 MB

english, 2012

2

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

M. Laamanen, M. Blomberg, R.L. Puurunen, A. Miranto, H. Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2010

Language:

english

File:

PDF, 200 KB

english, 2010

3

14 MHz micromechanical oscillator

T. Mattila, O. Jaakkola, J. Kiihamäki, J. Karttunen, T. Lamminmäki, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, I. Tittonen

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 158 KB

english, 2002

4

A 12 MHz micromechanical bulk acoustic mode oscillator

T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, I. Tittonen

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 260 KB

english, 2002

5

“Plug-up”—a new concept for fabricating SOI MEMS devices

J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. Mattila

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 940 KB

english, 2004

6

Integrated Water Resources Management in Practice: Better Water Management for Development – Edited by Roberto Lenton and Mike Muller

Journal:

Natural Resources Forum (John Wiley and Sons)

Year:

2009

Language:

english

File:

PDF, 59 KB

english, 2009

7

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

R.L. Puurunen, A. Häärä, H. Saloniemi, J. Dekker, M. Kainlauri, H. Pohjonen, T. Suni, J. Kiihamäki, E. Santala, M. Leskelä, H. Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 692 KB

english, 2012

8

Layered tantalum-aluminum oxide films deposited by atomic layer epitaxy

H. Kattelus, M. Ylilammi, J. Saarilahti, J. Antson, S. Lindfors

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 223 KB

english, 1993

9

In situ boron-doped LPCVD polysilicon with low tensile stress for MEMS applications

Mari Ylönen, Altti Torkkeli, Hannu Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 340 KB

english, 2003

10

Amorphous metal alloy based MEMS for RF applications

Mari Ylönen, Tauno Vähä-Heikkilä, Hannu Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 901 KB

english, 2006

11

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, Hannu Kattelus, Anu Kärkkäinen, Tor Meinander, Aarne Oja, Panu Pekko, Heikki Seppä, Mika Suhonen, Heikki Kuisma, Sami Ruotsalainen, Markku Tilli

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 909 KB

english, 2008

12

Electrically tunable surface micromachined Fabry–Perot interferometer for visible light

M. Blomberg, H. Kattelus, A. Miranto

Journal:

Sensors and Actuators A: Physical

Year:

2010

Language:

english

File:

PDF, 369 KB

english, 2010

13

Depth and profile control in plasma etched MEMS structures

J. Kiihamäki, H. Kattelus, J. Karttunen, S. Franssila

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.68 MB

english, 2000

14

“Plug-up”–a new concept for fabricating SOI MEMS devices

J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. Mattila

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 320 KB

english, 2004

15

Low-temperature bonding of thick-film polysilicon for microelectromechanical system (MEMS)

H. Luoto, T. Suni, M. Kulawski, K. Henttinen, H. Kattelus

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 400 KB

english, 2006

16

Characterization of reacted ohmic contacts to GaAs

H.P. Kattelus, J.L. Tandon, M-A. Nicolet

Journal:

Solid-State Electronics

Year:

1986

Language:

english

File:

PDF, 287 KB

english, 1986

17

Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems

H. KATTELUS, M. YLÖNEN, M. BLOMBERG

Journal:

Fatigue & Fracture of Engineering Materials & Structures

Year:

2005

Language:

english

File:

PDF, 206 KB

english, 2005

18

Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes

L. Hiltunen, H. Kattelus, M. Leskelä, M. Mäkelä, L. Niinistö, E. Nykänen, P. Soininen, M. Tiittad

Journal:

Materials Chemistry and Physics

Year:

1991

Language:

english

File:

PDF, 666 KB

english, 1991

19

Nanolayered gradient structures as an intermediate layer for diamond coatings

Koskinen, J., Hirvonen, J.-P., Hannula, S.-P., Pischow, K., Kattelus, H., Suni, I.

Journal:

Diamond and Related Materials

Year:

1994

Language:

english

File:

PDF, 598 KB

english, 1994

20

Myanmar under reform: Emerging pressures on water, energy and food security

Kattelus, Mirja, Rahaman, Muhammad Mizanur, Varis, Olli

Journal:

Natural Resources Forum (John Wiley and Sons)

Year:

2014

Language:

english

File:

PDF, 385 KB

english, 2014

21

Wet Refinement of Dry Etched Trenches in Silicon

Kattelus, Hannu P.

Journal:

Journal of The Electrochemical Society

Year:

1997

Language:

english

File:

PDF, 1.57 MB

english, 1997

22

A process for SOI resonators with surface micromachined covers and reduced electrostatic gaps

J. R. Dekker, A. Alastalo, H. Kattelus

Year:

2010

Language:

english

File:

PDF, 1.10 MB

english, 2010

23

Hydropower development in Myanmar and its implications on regional energy cooperation

Kattelus, Mirja, Rahaman, Muhammad Mizanur, Varis, Olli

Journal:

International Journal of Sustainable Society

Year:

2015

Language:

english

File:

PDF, 1.22 MB

english, 2015

24

Detection of gear pitting failure progression with on-line particle monitoring

Kattelus, J., Miettinen, J., Lehtovaara, A.

Journal:

Tribology International

Year:

2017

Language:

english

File:

PDF, 848 KB

english, 2017

25

The challenges of cross-disciplinary work: accounting and financial reporting for governments and nonprofits

Kattelus, Susan C., Cheng, Rita H., Engstrom, John H.

Journal:

Journal of Public Budgeting, Accounting & Financial Management

Year:

2005

Language:

english

File:

PDF, 240 KB

english, 2005

26

The Water-Energy-Food Nexus and the Transboundary Context: Insights from Large Asian Rivers

Keskinen, Marko, Guillaume, Joseph, Kattelus, Mirja, Porkka, Miina, Räsänen, Timo, Varis, Olli

Journal:

Year:

2016

Language:

english

File:

PDF, 3.57 MB

english, 2016

27

Crystallization and oxidation behavior of Mo-Si-N coatings

J.-P. Hirvonen, I. Suni, H. Kattelus, R. Lappalainen, P. Torri, H. Kung, T.R. Jervis, M. Nastasi, J.R. Tesmer

Journal:

Surface and Coatings Technology

Year:

1995

Language:

english

File:

PDF, 556 KB

english, 1995

28

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

M. Laamanen, M. Blomberg, R.L. Puurunen, A. Miranto, H. Kattelus

Journal:

Procedia Chemistry

Year:

2009

Language:

english

File:

PDF, 138 KB

english, 2009

29

Stress control of sputter-deposited Mo–N films for micromechanical applications

H Kattelus, J Koskenala, A Nurmela, A Niskanen

Journal:

Microelectronic Engineering

Year:

2002

Language:

english

File:

PDF, 707 KB

english, 2002

30

Potential of amorphous Mo–Si–N films for nanoelectronic applications

M. Ylönen, H. Kattelus, A. Savin, P. Kivinen, T. Haatainen, J. Ahopelto

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 123 KB

english, 2003

31

Atomic layer epitaxy of III–V compounds in a hydride vapor phase system

Ahopelto, J., Kattelus, H.P., Saarilahti, J., Suni, I.

Journal:

Journal of Crystal Growth

Year:

1990

Language:

english

File:

PDF, 356 KB

english, 1990

32

Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

M. Blomberg, H. Kattelus, A. Miranto

Journal:

Procedia Chemistry

Year:

2009

Language:

english

File:

PDF, 136 KB

english, 2009

33

Implications of GASB's New Reporting Model for Municipal Bond Analysts and Managers

Earl R. Wilson, Susan C. Kattelus

Journal:

Public Budgeting & Finance

Year:

2001

Language:

english

File:

PDF, 61 KB

english, 2001

34

Stimulation of human embryonic stem cell-derived cardiomyocytes on thin-film microelectrodes

Dr. Jouko Viitanen, Päivi Heimala, Ari Hokkanen, Kristiina Iljin, Erja Kerkelä, Kai Kolari, Hannu Kattelus

Journal:

Biotechnology Journal

Year:

2011

Language:

english

File:

PDF, 180 KB

english, 2011

35

Modification of interfacial characteristics between diamondlike carbon films and substrates by using ion bombardment

J.-P. Hirvonen, J. Koskinen, I. Koponen, J. Likonen, H. Kattelus

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1993

Language:

english

File:

PDF, 346 KB

english, 1993

36

Reduction of molybdenum resistivity by a seed layer of TiW

S. Franssila, H. Kattelus, E. Nykänen

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 413 KB

english, 1997

37

IC compatible planar inductors on silicon

Ronkainen, H., Kattelus, H., Tarvainen, E., Ruhisaari, T., Andersson, M., Kuivalainen, P.

Journal:

IEE Proceedings - Circuits Devices and Systems

Year:

1997

Language:

english

File:

PDF, 751 KB

english, 1997

38

Accounting for the “invisible” nonprofit sector: Five mini-cases

James C. Young, Susan C. Kattelus

Journal:

Journal of Accounting Education

Year:

1995

Language:

english

File:

PDF, 1.27 MB

english, 1995

39

Tribological characteristics of MoSi2/SiC nanocomposites

J-P. Hirvonen, P. Torri, R. Lappalainen, I. Suni, H. Kattelus, H. Kung, M. Nastasi, T.R. Jervis

Journal:

Nanostructured Materials

Year:

1995

Language:

english

File:

PDF, 1.18 MB

english, 1995

40

Further Evidence on the Determinants of Municipal Audit Fees

D. Dewey Ward, Randal J. Elder and Susan C. Kattelus

Journal:

The Accounting Review

Year:

1994

Language:

english

File:

PDF, 1.61 MB

english, 1994

41

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - "PLUG-UP" - a new concept for fabricating SOI MEMS devices

Kiihamaki, J., Pekko, P., Kattelus, H., Sillanpaa, T., Mattila, T.

Year:

2003

Language:

english

File:

PDF, 358 KB

english, 2003

42

[IEEE ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures - Kobe, Japan (19-22 March 2001)] ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) - Use of electrical test structures to characterize trench profiles etched on SOI wafers

Guillaume, N., Kiihamaki, J., Karttunen, J., Kattelus, H.

Year:

2001

Language:

english

File:

PDF, 510 KB

english, 2001

43

Accounting for Governmental and Nonprofit Entities

WILSON, EARL R., RECK, JACQUELINE L., KATTELUS, SUSAN C., Robbins, Walter A.

Journal:

Issues in Accounting Education

Year:

2010

Language:

english

File:

PDF, 52 KB

english, 2010

44

[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Micromechanical actuators for spectroscopic measurements

Antila, J., Kattelus, H., Saari, H.

Year:

2005

Language:

english

File:

PDF, 233 KB

english, 2005

45

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Square-extensional mode single-crystal silicon micromechanical RF-resonator

Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., Kattelus, H., Koskenvuori, M., Rantakari, P., Tittonen, I., Seppa, H.

Year:

2003

Language:

english

File:

PDF, 293 KB

english, 2003

46

[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - A novel methdod for processing capacitive micromechanical ultrasonic transducers (cMUT)

Saarilahti, J., Blomberg, M., Haard, A., Kattelus, H.

Year:

2002

Language:

english

File:

PDF, 549 KB

english, 2002

47

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Direct wafer bonding of atomic layer deposited TiO2 and Al2O3 thin films

Puurunen, R. L., Suni, T., Ylivaara, O., Kondo, H., Ammar, M., Ishida, T., Fujita, H., Bosseboeuf, A., Zaima, S., Kattelus, H.

Year:

2011

Language:

english

File:

PDF, 2.00 MB

english, 2011

48

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Modular integration of CMOS and SOI-MEMS using "plug-up" concept

Kiihamaki, J., Ronkainen, H., Pekko, P., Kattelus, H., Theqvist, K.

Year:

2003

Language:

english

File:

PDF, 248 KB

english, 2003

49

Sputtered W–N diffusion barriers

Kattelus, H. P.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1985

Language:

english

File:

PDF, 959 KB

english, 1985

50

Bias-induced stress transitions in sputtered TiN films

Kattelus, H. P.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1986

Language:

english

File:

PDF, 705 KB

english, 1986

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